Figure 4From: Material Removal Characteristics of Single-Crystal 4H-SiC Based on Varied-Load Nanoscratch TestsSurface morphology characteristics of scratches: (a) Si-plane: (a1) Front part, (a2) Middle part, (a3) Final part, (a4) Depth-distance curve; (b) C-plane: (b1) Front part, (b2) Middle part, (b3) Final part, (b4) Depth-distance curveBack to article page