Figure 5From: Material Removal Characteristics of Single-Crystal 4H-SiC Based on Varied-Load Nanoscratch TestsSurface morphology characteristics of scratches under different indenter directions: (a) Edge forward: (a1) Front part, (a2) Final part, (a3) Depth-distance curve; (b) Face forward: (b1) Front part, (b2) Final part, (b3) Depth-distance curve; (c) Side face forward: (c1) Front part, (c2) Final part, (c3) Depth-distance curveBack to article page