Figure 6From: Material Removal Characteristics of Single-Crystal 4H-SiC Based on Varied-Load Nanoscratch TestsSurface morphology characteristics of scratches under different normal loading rates: (a) 5 mN/s: (a1) Front part, (a2) Final part, (a3) Depth-distance curve; (b) 7 mN/s: (b1) Front part, (b2) Final part, (b3) Depth-distance curve; (c) 10 mN/s: (c1) Front part, (c2) Final part, (c3) Depth-distance curveBack to article page