Figure 7
From: Material Removal Characteristics of Single-Crystal 4H-SiC Based on Varied-Load Nanoscratch Tests
Surface morphology characteristics of the scratches at different scratch intervals: (a) 3 μm: (a1) Front part, (a2) Final part, (a3) Depth-distance curve; (b) 5 μm: (b1) Front part, (b2) Final part, (b3) Depth-distance curve; (c) 8 μm: (c1) Front part, (c2) Final part, (c3) Depth-distance curve; (d) 11 μm: (d1) Front part, (d2) Final part, (d3) Depth-distance curve; (e) 14 μm: (e1) Front part, (e2) Final part, (e3) Depth-distance curve