Table 2 Performance indexes of difference methods for the 3D circular trajectory
Controllers | Tracking errors of X axis | Tracking errors of Y axis | Tracking errors of Z axis | Contour errors | ||||
|---|---|---|---|---|---|---|---|---|
|e|max | |e|rms | |e|max | |e|rms | |e|max | |e|rms | |ε|max | |ε|rms | |
P-PI (\(\upmu\)m) | 63.3 | 12.7 | 65.6 | 13.7 | 67.6 | 13.2 | 67.3 | 22.3 |
P-PI + TEFC (\(\upmu\)m) | 33.8 | 9.2 | 36.6 | 10.6 | 43.7 | 11.0 | 43.2 | 17.0 |
P-PI + LFC (\(\upmu\)m) | 30.4 | 3.6 | 35.3 | 4.2 | 34.1 | 4.8 | 49.0 | 6.8 |
P-PI + NMPFP (\(\upmu\)m) | 21.0 | 4.7 | 19.7 | 4.1 | 18.3 | 3.0 | 20.9 | 6.6 |