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Table 2 Pump dimensions and measured pump performance [41]

From: Advances in Valveless Piezoelectric Pump with Cone-shaped Tubes

Pump

Neck width

W1 / μm

Diffuser length

L / μm

L/W1

Divergence angle

α / (°)

Diaphragm amplitude

d 1 / μm

Methanol

Max. flow

Q 1 / (μL·min−1)

Max. pressure

H 1 / mH2O

Diaphragm amplitude

d 2 / μm

Water

Max. flow

Q 2 / (μL·min−1)

Max. pressure

H 2 / mH2O

1a

20

273

13.7

9.8

0.27

314

2.76

2a

40

547

13.7

9.8

0.55

628

2.70

2b

40

720

18.0

9.8

0.34

781

3.92

2e

40

1000

25.0

9.8

0.40

1156

3.81

3a

80

1093

13.7

9.8

0.66

1537

5.57

0.64

1946

5.44

3b

80

1440

18.0

9.8

0.69

2900

5.58

0.39

1285

2.44

3c

80

1093

13.7

7.0

0.68

2693

6.17

0.72

2270

7.57

3d

80

1093

13.7

13

0.63

3427

6.00

0.58

2218

4.71

  1. “–” Not measured