From: Advances in Valveless Piezoelectric Pump with Cone-shaped Tubes
Pump | Neck width W1 / μm | Diffuser length L / μm | L/W1 | Divergence angle α / (°) | Diaphragm amplitude d 1 / μm Methanol | Max. flow Q 1 / (μL·min−1) | Max. pressure H 1 / mH2O | Diaphragm amplitude d 2 / μm Water | Max. flow Q 2 / (μL·min−1) | Max. pressure H 2 / mH2O |
---|---|---|---|---|---|---|---|---|---|---|
1a | 20 | 273 | 13.7 | 9.8 | 0.27 | 314 | 2.76 | – | – | – |
2a | 40 | 547 | 13.7 | 9.8 | 0.55 | 628 | 2.70 | – | – | – |
2b | 40 | 720 | 18.0 | 9.8 | 0.34 | 781 | 3.92 | – | – | – |
2e | 40 | 1000 | 25.0 | 9.8 | 0.40 | 1156 | 3.81 | – | – | – |
3a | 80 | 1093 | 13.7 | 9.8 | 0.66 | 1537 | 5.57 | 0.64 | 1946 | 5.44 |
3b | 80 | 1440 | 18.0 | 9.8 | 0.69 | 2900 | 5.58 | 0.39 | 1285 | 2.44 |
3c | 80 | 1093 | 13.7 | 7.0 | 0.68 | 2693 | 6.17 | 0.72 | 2270 | 7.57 |
3d | 80 | 1093 | 13.7 | 13 | 0.63 | 3427 | 6.00 | 0.58 | 2218 | 4.71 |