Table 3 Geometrical parameters of pump chamber, diaphragm and grille mm
From: Theory and Experimental Verification on Cymbal-shaped Slotted Valve Piezoelectric Pump
Parameter name | Diaphragm thickness h 3 | Grille thickness h 4 | Chamber diameter d 3 | Chamber depth h 5 |
|---|---|---|---|---|
Value | 0.2 | 0.5 | 40 | 1.5 |