Table 1 Comparison of the destructive methods for SSD detection
Methods | Advantages | Disadvantages |
|---|---|---|
Polishing techniques | Simple, mature, and easy to operate | 1. Etching after polishing leading to crack propagation and thus measurement errors 2. Acquiring local SSD only; inability to detect the global distribution and three-dimensional configuration of SSD |
Cross-sectional microscopy | Simple and observable with high precision | Acquiring local SSD only; inability to detect the global distribution and three-dimensional configuration of SSD |
TEM microscopy | High resolution for micro/nano damage detection | 1. Sophisticated procedures for sample preparation 2. Inability to detect SSD larger than tens of microns |
Chemical etching | Easy to operate with low cost | 1. Etching leading to crack propagation and thus measurement errors 2. Chemicals detrimental to human health and environmental protection |