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Table 2 Comparison among the non-destructive methods for SSD detection

From: Methods for Detection of Subsurface Damage: A Review

Methods

Advantages

Disadvantages

Predictive methods

Simple, rapid and low cost

1. Applicable to predicting the statistic SSD depth rather than the maximum depth

2. Unable to predict the three-dimensional configuration and the distribution of SSD

3. Bad universality

OCT

Global scanning and applicable to three-dimensional configuration and spatial distribution of SSD

1. Inapplicable to detecting low light-scattering materials

2. Difficult to process images

3. Interfered by surface scattering

TIRM

Global scanning and in-process detection

1. Hard to measure SSD depth quantitatively

2. High requirement on surface condition, suitable for polished samples

CLSM

1. Global scanning and applicable to three-dimensional configuration and spatial distribution of SSD

2. High resolution

1. High requirement on surface condition, suitable for polished samples

2. Interfered by surface scattering

CPCM

1. Rapid global scanning

2. High resolution in depth direction

3. Low requirement on surface roughness

Low lateral resolution

SAM

1. High detection efficiency

2. High resolution in depth direction

1. Low lateral resolution

2. High requirement on surface condition