Methods | Advantages | Disadvantages |
---|---|---|
Predictive methods | Simple, rapid and low cost | 1. Applicable to predicting the statistic SSD depth rather than the maximum depth 2. Unable to predict the three-dimensional configuration and the distribution of SSD 3. Bad universality |
OCT | Global scanning and applicable to three-dimensional configuration and spatial distribution of SSD | 1. Inapplicable to detecting low light-scattering materials 2. Difficult to process images 3. Interfered by surface scattering |
TIRM | Global scanning and in-process detection | 1. Hard to measure SSD depth quantitatively 2. High requirement on surface condition, suitable for polished samples |
CLSM | 1. Global scanning and applicable to three-dimensional configuration and spatial distribution of SSD 2. High resolution | 1. High requirement on surface condition, suitable for polished samples 2. Interfered by surface scattering |
CPCM | 1. Rapid global scanning 2. High resolution in depth direction 3. Low requirement on surface roughness | Low lateral resolution |
SAM | 1. High detection efficiency 2. High resolution in depth direction | 1. Low lateral resolution 2. High requirement on surface condition |