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Figure 12 | Chinese Journal of Mechanical Engineering

Figure 12

From: Friction-Induced Nanofabrication: A Review

Figure 12

Fabrication of silicon nanostructures through scratching silicon surfaces with a diamond tip followed by subsequent wet etching [61, 62]: (a) Schematic diagram showing the sliding process in KOH solution. The right panel displayed AFM topography of fabricated structures, and the correlation of inclination (α) of the protrusive structures and scratching speed in the y direction (Vy). (b) Schematic diagram showing the shape of the structure fabricated by the scratching along <112> and <110> directions. The right panel displayed SEM image of high-aspect-ratio structures fabricated by the scratching along <112> direction and subsequent etching in KOH solution

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