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Figure 2 | Chinese Journal of Mechanical Engineering

Figure 2

From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Figure 2

Some CMMs fabricated by MUMPs (a, b, c) and SUMMiT (d, e, f): (a) The self-retracting fully compliant bistable mechanism by Masters et al. [20] (©IEEE. Adapted by permission from IEEE. Permission to reuse must be obtained from the rightsholder), (b) The compliant microgripper by Dechev et al. [50] (©IEEE. Adapted by permission from IEEE. Permission to reuse must be obtained from the rightsholder), (c) The self-reconfiguring metamorphic nanoinjector by Aten et al. [42] (©AIP. Adapted by permission from AIP. Permission to reuse must be obtained from the rightsholder), (d) The stroke amplifier with electrostatic actuator combined, by Kota et al. [51] (©IEEE. Adapted by permission from IEEE. Permission to reuse must be obtained from the rightsholder), (e) The thermal actuator with force gauge attached, by Wittwer et al. [19] (©Elsevier. Adapted by permission from Elsevier. Permission to reuse must be obtained from the rightsholder), (f) The fully compliant double tensural tristable micromechanism by Chen et al. [40] (©IOP. Adapted by permission of IOP. Permission to reuse must be obtained from the rightsholder)

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