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Chinese Journal of Mechanical Engineering
Figure 3 | Chinese Journal of Mechanical Engineering

Figure 3

From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Figure 3

CMMs fabricated via bulk micromachining: (a) Nanopositioner by Chen and Culpepper [28] (©Elsevier. Adapted by permission of Elsevier. Permission to reuse must be obtained from the rightsholder), (b) Electrothermally actuated microgripper by Volland et al. [55] (©Elsevier. Adapted by permission of Elsevier. Permission to reuse must be obtained from the rightsholder), (c) Multi-fingered micromechanism for coordinated micro/nano manipulation by Krishnan and Saggere [56] (©IOP. Adapted by permission of IOP. Permission to reuse must be obtained from the rightsholder), (d) Compliant microtransmission from the dissolved silicon wafer process by Chu et al. [57] (©Elsevier. Adapted by permission of Elsevier. Permission to reuse must be obtained from the rightsholder)

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