Figure 5From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A ReviewCMMs fabricated via wire EDM: (a) microgripper fabricated using Al plate [68] (©IEEE. Adapted by permission of IEEE. Permission to reuse must be obtained from the rightsholder), (b) variable-focus reflector fabricated using Ti plate [69] (©Elsevier. Adapted by permission of Elsevier. Permission to reuse must be obtained from the rightsholder)Back to article page