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Figure 6 | Chinese Journal of Mechanical Engineering

Figure 6

From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Figure 6

CMMs fabricated via electroplated Ni or NiFe: (a) Electrothermally-actuated compliant microtransmission fabricated using LIGA [57] (©Elsevier. Adapted by permission of Elsevier. Permission to reuse must be obtained from the rightsholder), (b) Microgripper fabricated from nickel, by Huang and Chen [72] (©IEEE. Adapted by permission of IEEE. Permission to reuse must be obtained from the rightsholder), (c) Compliant in-plane rotary bistable micromechanism fabricated from NiFe, by Luharuka and Hesketh [73] (©Elsevier. Adapted by permission of Elsevier. Permission to reuse must be obtained from the rightsholder)

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