Figure 9From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A ReviewCMMs fabricated using SU-8: (a) Microgripper with integrated thermal actuator [88] (©IEEE. Adapted by permission of IEEE. Permission to reuse must be obtained from the rightsholder), (b) 90° folded Tsang mechanism [44] (©IOP. Adapted by permission of IOP. Permission to reuse must be obtained from the rightsholder)Back to article page