Table 1 Overview of the sets of keywords used in the literature survey

(1) Compliant micromechanisms

• Compliant, flexible, flexure, monolithic

• Micro, MEMS

• Mechanism, structure, design, gripper, manipulator, bistable, lamina emergent, motion amplifier, micro transmission

(2) Manufacturing processes

• Surface, MUMPs, SUMMiT, bulk, wire EDM, laser, molding, LIGA, UV-LIGA, DRIE, 3D printing

(3) Constituent materials

• Silicon, polysilicon, SU8, PDMS, aluminum, carbon nanotube

• Composite, polymer

(4) Application fields

• Micro aerial vehicle, micro relay, motion amplification, micro transmission, force sensing, biological manipulation