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Table 2 Overview of the essential features of the SUMMiT and MUMPs processes

From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Proc. feature Fabric. resolution (μm) Thickness (μm) Aspect ratio Fabric. dev. (μm)
SUMMiT 0.8 [43] 1‒6.5 < 10 0.1 [46]
MUMPs 2 [20] 1.5‒3.5 < 2 0.2 [48]