From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review
Proc. feature
Fabric. resolution (μm)
Thickness (μm)
Aspect ratio
Fabric. dev. (μm)
SUMMiT
0.8 [43]
1‒6.5
< 10
0.1 [46]
MUMPs
2 [20]
1.5‒3.5
< 2
0.2 [48]
