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Table 3 Overview of the constituent material properties of the SUMMiT and MUMPs processes

From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review

Mater. Prop. Young’s modulus (GPa) Poisson’s ratio Yield stress (GPa) Yield strain (%)
SUMMiT 164±3.2 [46] 0.23 [46] 1 [46] 0.6
MUMPs 158±10 [44] 0.22 ± 0.01 [44] 1.65 ± 0.28 [48] ~ 1.05