From: Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review
Mater. Prop.
Young’s modulus (GPa)
Poisson’s ratio
Yield stress (GPa)
Yield strain (%)
SUMMiT
164±3.2 [46]
0.23 [46]
1 [46]
0.6
MUMPs
158±10 [44]
0.22 ± 0.01 [44]
1.65 ± 0.28 [48]
~ 1.05
