Figure 18From: Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining SystemChange of the deformation for the fifth indentation center point of the 3 × 3 indentation arrays obtained by the rotation angle of 45° in Z direction with the time for the spacings of a 1 μm, b 2 μm and c 3 μmBack to article page