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Table 1 Depth variation of each indentation during the one array indentations with the rotation angle of 0° and the spacing of 1 μm

From: Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System

Test

First (nm)

Second (nm)

Third (nm)

Fourth (nm)

Fifth (nm)

1

742

2

628

773

3

614

687

697

4

614

672

598

632

5

614

671

596

556

642