From: Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System
Test | First (nm) | Second (nm) | Third (nm) | Fourth (nm) | Fifth (nm) |
---|---|---|---|---|---|
1 | 742 | ‒ | ‒ | ‒ | ‒ |
2 | 628 | 773 | ‒ | ‒ | ‒ |
3 | 614 | 687 | 697 | ‒ | ‒ |
4 | 614 | 672 | 598 | 632 | ‒ |
5 | 614 | 671 | 596 | 556 | 642 |