Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System

Chinese Journal of Mechanical Engineering

Table 2 Depth variation of each indentation during the one array indentations with the rotation angle of 0° and the spacing of 2 μm

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	680	698	‒	‒	‒
3	671	639	591	‒	‒
4	670	634	542	616	‒
5	670	634	542	542	601

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	680	698	‒	‒	‒
3	671	639	591	‒	‒
4	670	634	542	616	‒
5	670	634	542	542	601

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	680	698	‒	‒	‒
3	671	639	591	‒	‒
4	670	634	542	616	‒
5	670	634	542	542	601

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	680	698	‒	‒	‒
3	671	639	591	‒	‒
4	670	634	542	616	‒
5	670	634	542	542	601