Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System

Chinese Journal of Mechanical Engineering

Table 3 Depth variation of each indentation during the one array indentations with the rotation angle of 0° and the spacing of 3 μm

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	707	697	‒	‒	‒
3	706	659	634	‒	‒
4	706	654	580	642	‒
5	705	651	580	582	626

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	707	697	‒	‒	‒
3	706	659	634	‒	‒
4	706	654	580	642	‒
5	705	651	580	582	626

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	707	697	‒	‒	‒
3	706	659	634	‒	‒
4	706	654	580	642	‒
5	705	651	580	582	626

Test	First (nm)	Second (nm)	Third (nm)	Fourth (nm)	Fifth (nm)
1	742	‒	‒	‒	‒
2	707	697	‒	‒	‒
3	706	659	634	‒	‒
4	706	654	580	642	‒
5	705	651	580	582	626