Table 3 Comparisons between experimental and simulated values of machining deformation
From: Stress-Induced Deformation of Thin Copper Substrate in Double-Sided Lapping
Effect factors | Initial residual stress | Machining stress | |
|---|---|---|---|
Finite element simulation deformation value (μm) | 20.96 | Strategy I | Strategy II |
0.09 | 0.29 | ||
The actual measured deformation value (μm) | 27.12 | ||