Table 1 The materials and geometric parameters of several typical probes
Institute (item name) | Material of probe ball | Material of probe shaft | Diameter of probe ball d/µm | Length of probe shaft l/mm |
|---|---|---|---|---|
IBS (Triskelion probe) | Ruby | Tungsten carbide | 500 | 8.5 |
PTB (ruby probe) | Ruby | Glass fiber | 300 | 5 |
Zeiss (F25) | Ruby | Glassy carbon | 120 | 4 |
MEATS | Ruby | NA | 100–1000 | NA |
HFUT | Ruby | Tungsten | 500 | 10 |
AIST (M-CMM) | Ruby | Tungsten carbide | 30 | 2 |
Eindhoven probe | Ruby | Titanium | 1000–4000 | 30 |
NIST | Glass fiber | Glass fiber | 75 | 20 |
HFUT | Glass fiber | Glass fiber | 300 | 10 |
PTB (Werth fiber probe) | Glass fiber | Glass fiber | 25 | NA |
Unisa | Glass fiber | Glass fiber | 300–400 | 5 |
Tohoku University | Glass fiber | Glass fiber | 52.3 | NA |
NTUT (Static Tri-Switches Tactile Probe) | Glass fiber | Glass fiber | 120 | NA |
NPL | Silicon nitride | Tungsten carbide | 300 | 1–3 |