Table 1 Specifications for KDP crystal machining

Spatial frequency (mm⁻¹)

0.0025‒0.03

0.03‒0.4

0.4‒8.3

8.3‒100

 Spatial period (mm)

400‒33

33‒2.5

2.5‒0.12

0.12‒0.01

  Parameter index I

GRMS / (nm · cm⁻¹)

11

Rq / nm

5

Rq / nm

2.6 pk, 1.5 avg

Rq / nm

2.5 pk, 1.5 avg

  Parameter index II

None

PSD/ (nm² · mm)

PA

PSD/ (nm² · mm)

PA

None