Figure 1
From: Closed-Form Modeling and Analysis of an XY Flexure-Based Nano-Manipulator
Schematic diagram of the nano-manipulator. t1, t2: Minimal thickness of circular and leaf flexures, t1 = 0.58, t2 = 0.44, t3: Thickness of linkages, t3 = 4, r: Radius of the circular flexure hinge, r = 3.41, t1, t2, t3: Parameters of the lever mechanism, h1 = 11.1, h2 = 18, h3 = 72, l1, l2, l4: Length of leaf flexures, l1 = 17.61, l2 = 16.61, l4 = 22.39, l3: Width of the central platform, l3 = 27.78, d: Out-of-plane depth of the nano-manipulator, d = 20.