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Table 1 Deposition parameters for synthesizing typical types of mono-layer diamond films

From: Approach for Polishing Diamond Coated Complicated Cutting Tool: Abrasive Flow Machining (AFM)

 

Nucleation

UMCD

UFGD

BDMCD

BDFGD

Flux of H2 QH (mL/min)

  

1100

  

Flux of acetone QAce (mL/min)

  

20

  

B/C atomic ratio AR (ppm)

0

0

0

4500

4500

Pressure p (Pa)

1600

4000

1300

4000

1300

Filament diameter Df (mm)

  

0.6

  

Filament length lf (mm)

  

150

  

Filament separation sf (mm)

  

36

  

Filament height hf (mm)

  

−6

  

Filament temperature Ts (°C)

  

2100 ± 100

  

Substrate temperature Ts (°C)

  

850 ± 50

  

Growth duration tg (h)

0.5

12

9

11

8