Table 3 Covariance matrix of \(\alpha ,\beta ,\gamma ,\Delta x,\Delta y,\Delta z\) (mm2)
From: An Improved Measurement Uncertainty Calculation Method of Profile Error for Sculptured Surfaces
Covariance | \(\alpha\) | \(\beta\) | \(\gamma\) | \(\Delta x\) | \(\Delta y\) | \(\Delta z\) |
|---|---|---|---|---|---|---|
\(\alpha\) | 9.44 × 10−8 | 3.90 × 10−9 | − 4.01 × 10−9 | − 3.12 × 10−7 | 6.30 × 10−7 | − 8.2 × 10−6 |
\(\beta\) | 3.90 × 10−9 | 5.78 × 10−8 | − 7.06 × 10−10 | − 2.89 × 10−7 | − 8.23 × 10−7 | 7.10 × 10−6 |
\(\gamma\) | − 4.01 × 10−9 | −7.06 × 10−10 | 3.63 × 10−9 | 3.54 × 10−7 | − 6.38 × 10−7 | 4.83 × 10−7 |
\(\Delta x\) | − 3.12 × 10−7 | − 2.89 × 10−7 | 3.54 × 10−7 | 4.23 × 10−5 | − 5.62 × 10−5 | 2.59 × 10−5 |
\(\Delta y\) | 6.30 × 10−7 | − 8.23 × 10−7 | − 6.38 × 10−7 | − 5.62 × 10−5 | 1.41 × 10−4 | − 1.90 × 10−4 |
\(\Delta z\) | − 8.24 × 10−6 | 7.10 × 10−6 | 4.83 × 10−7 | 2.59 × 10−5 | − 1.90 × 10−4 | 1.877 × 10−3 |