Table 5 Covariance matrix of \(\alpha ,\beta ,\gamma ,\Delta x,\Delta y,\Delta z\) (mm2)
From: An Improved Measurement Uncertainty Calculation Method of Profile Error for Sculptured Surfaces
Covariance | \(\alpha\) | \(\beta\) | \(\gamma\) | \(\Delta x\) | \(\Delta y\) | \(\Delta z\) |
|---|---|---|---|---|---|---|
\(\alpha\) | 1.46 × 10−7 | 6.95 × 10−8 | 6.74 × 10−9 | 2.12 × 10−7 | − 1.52 × 10−6 | − 4.23 × 10−6 |
\(\beta\) | 6.95 × 10−8 | 5.74 × 10−8 | 7.05 × 10−9 | 4.28 × 10−7 | − 1.75 × 10−6 | 1.66 × 10−6 |
\(\gamma\) | 6.74 × 10−9 | 7.05 × 10−9 | 3.97 × 10−9 | 4.27 × 10−7 | − 7.35 × 10−7 | 1.08 × 10−6 |
\(\Delta x\) | 2.12 × 10−7 | 4.28 × 10−7 | 4.27 × 10−7 | 5.20 × 10−6 | − 7.39 × 10−6 | 1.28 × 10−4 |
\(\Delta y\) | − 1.52 × 10−6 | − 1.75 × 10−6 | − 7.35 × 10−7 | − 7.39 × 10−5 | 1.47 × 10−4 | − 2.20 × 10−4 |
\(\Delta z\) | − 4.23 × 10−6 | 1.66 × 10−6 | 1.08 × 10−6 | 1.28 × 10−4 | − 2.20 × 10−4 | 9.21 × 10−4 |