Table 4 Overview of process features and material properties for all process-material combinations
Process | Material | Smallest resolution (μm) | Max. thickness (μm) | Aspect ratio | Manuf. error | Manuf. cost | Young’s Modulus (GPa) | Poisson’s ratio | Failure strength (MPa) | Max. allowable strain (%) |
|---|---|---|---|---|---|---|---|---|---|---|
Surface micromachining | Polysilicon [46] | 1‒5 | < 10 | < 10 | Low | High | 150‒170 | 0.23 | ~ 1640 | ~ 1.05 |
Aluminium [112] | 1‒5 | 2 | ‒ | Low | ‒ | 60‒75 | 0.32 | ~ 100 | ~ 0.15 | |
PI-2611 [113] | 20‒50 | 10 | ‒ | ‒ | ‒ | 8.5 | ‒ | 350 | ‒ | |
Bulk micromachining | Silicon [114] | 1‒5 | ‒ | 20‒30 | Low | High | 150‒170 | 0.23 | < 7000*1 | 1‒2 |
PET [52] | ~ 20 | 250 | ~ 10 | ‒ | Low | 2.8 | 0.37‒0.44 | 60 | 2 | |
Laser micromachining | Aluminium [115] | 20‒30 | < 100 | < 5 | High | Low | 70 | 0.35 | 276 | 0.4 |
Nickel [62] | 20‒30 | 10‒20 | < 1 | High | Low | 210 | 0.31 | 475 | 0.2 | |
PMMA [64] | 500 | ~ 1000 | ~ 2 | High | Low | 1.8 | 0.35 | 76 | 4 | |
PU [116] | ~ 10 | 100‒200 | 10‒20 | High | Low | 0.076 | ‒ | ‒ | ‒ | |
PZT [65] | 100 | 200 | < 1 | High | Low | 67 | 0.3 | ‒ | 0.1 | |
Wire EDM | Titanium [69] | 100‒200 | ~ 1000 | 5‒10 | Low | 116 | 0.32 | 950 | 0.8 | |
Aluminium [68] | 100‒200 | 500‒1000 | < 10 | Low | 70 | 0.35 | 276 | 0.4 | ||
Micro molding | Nickel (LIGA) [57] | < 1 | 200 | 100 | Low | High | 115±10 | 0.31 | ~ 310 | 0.3 |
Nickel [76] | ~ 5 | 20‒200*2 | 10 | High | Low | 110‒220*3 | 0.31 | ~ 310 | 0.1‒0.3 | |
Nife [117] | ~ 5 | 20‒200*2 | 10 | High | Low | 182 | 0.3 | ‒ | ‒ | |
PDMS [25] | ‒ | ‒ | ‒ | High | Low | 3×10−4‒1.8×10−3 | 0.38 | 2.24 | ~ 200 | |
POM [79] | ‒ | ‒ | ‒ | High | Low | 2.57 | 0.38 | 62 | 2.4 | |
SU-8 processing | SU-8 [118] | 10‒20 | > 500 | 40‒50 | High | Low | 2‒5 | 0.22 | 35‒70 | 1‒2 |
CNT frameworking | CNT-PDMS [99] | 10 | < 100 | 10 | High | Low | 1.89×10−2/7.95×10−3 | 0.20 | ‒ | 20 |
CNT-carbon [33] | 10 | > 200 | 40 | Low | ‒ | 4‒6 | 0.28 | ~ 110 | 2‒2.5 | |
3D printing | FDM/ABS [102] | 200 | ‒ | ‒ | High | Low | 1.19‒2.9 | 0.29 | 18.5‒51 | 0.6‒4 |
FDM/nylon [103] | 200 | ‒ | ‒ | High | Low | 2.6‒3.0 | 0.39 | 78 | 2‒3 | |
SLA/R11 [106] | 25 | > 1000 | > 40 | Low | High | 2 | 0.3 | 54 | 2.7 | |
2PP/IP-Dip [110] | 1 | > 50 | > 50 | Low | High | 3‒4 | ‒ | ~ 60 | 1.5‒2 | |
ΜCLIP/CN982A75&PEGDA [105] | 7‒8 | > 1000 | > 100 | Low | High | 0.014‒0.021 | 0.3 | ‒ | ‒ |