ROI | Real thickness (µm) | The thickness of the top delamination defect | The thickness of the middle delamination defect | The thickness of the bottom delamination defect | |||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Thickness before SWT | Thickness after SWT | RE before SWT (%) | RE after SWT (%) | Thickness before SWT | Thickness after SWT | RE before SWT (%) | RE after SWT (%) | Thickness before SWT | Thickness after SWT | RE before SWT (%) | RE after SWT (%) | ||
1 | 130 | 134.084 | 132.405 | 3.142 | 1.850 | 134.565 | 134.825 | 3.512 | 3.712 | 136.305 | 131.665 | 4.850 | 1.281 |
2 | 130 | 137.465 | 130.245 | 5.742 | 2.496 | 139.725 | 129.085 | 7.481 | − 0.704 | 138.985 | 131.505 | 6.912 | 1.158 |
3 | 130 | 145.585 | 130.505 | 11.988 | 0.388 | 137.465 | 130.515 | 5.742 | 0.396 | 136.305 | 128.925 | 4.850 | − 0.827 |
4 | 130 | 141.885 | 130.344 | 9.142 | 0.265 | 151.305 | 132.184 | 16.388 | 1.680 | 139.205 | 130.605 | 7.081 | 0.465 |
5 | 130 | 132.245 | 129.505 | 1.727 | − 0.381 | 141.405 | 128.934 | 8.773 | − 0.820 | 152.505 | 130.205 | 17.312 | 0.158 |
Mean±SE | 130 ± 0 | 138.253 ± 2.460 | 130.601 ± 0.483 | – | – | 140.893 ± 2.845 | 131.109 ± 1.099 | – | – | 140.661 ± 3.026 | 130.581 ± 0.496 | – | – |