Table 5 The mean and standard deviation of geometric error distribution
Z | μm (μm) | μe (μm) | (μm − μe)/μe |
|---|---|---|---|
−300 | 46.15 | 45.15 | 2.2% |
0 | 28.70 | 28.17 | 1.9% |
100 | 27.54 | 27.10 | 1.6% |
300 | 32.19 | 32.70 | 1.6% |
Z | μm (μm) | μe (μm) | (μm − μe)/μe |
|---|---|---|---|
−300 | 46.15 | 45.15 | 2.2% |
0 | 28.70 | 28.17 | 1.9% |
100 | 27.54 | 27.10 | 1.6% |
300 | 32.19 | 32.70 | 1.6% |